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| 型號 | 測量范圍 | 最大應用范圍 | 最大允許誤差 | 重復性精度 | 最大垂直度誤差 |
| | | | L in m | ±2s | (機械的,正面的) |
| TESA-HITE 350 | 365mm | 745mm | 15μm | 5μm | 一 |
| TESA-HITE 600 | 615mm | 995mm | 20μm | 5μm | 一 |
| TESA-HITE+D 350 | 365mm | 745mm | (3+6.L)μm | ≤2μm | ±10μm |
| TESA-HITE+D 600 | 615mm | 995mm | (3+6.L)μm | ≤2μm | ±15μm |
| TESA-HITE 350 | 365mm | 745mm | (2+3.L)μm | ≤2μm | ±7μm |
| TESA-HITE 600 | 615mm | 995mm | (2+3.L)μm | ≤2μm | ±9μm |
| TESA-HITE 900 | 920mm | 1300mm | (2+3.L)μm | ≤2μm | ±11μm |
| TESA-HITE+M 350 | 365mm | 745mm | (2+1.5.L)μm | ≤0.5/1μm | ±5μm |
| TESA-HITE+M 600 | 615mm | 995mm | (2+1.5.L)μm | ≤0.5/1μm | ±7μm |
| TESA-HITE+M 900 | 920mm | 1300mm | (2+1.5.L)μm | ≤0.5/1μm | ±9μm |
| ＊帶特殊附件SO7001622 |